Device and method for treating workpieces

ABSTRACT

An apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD is provided. The method ensures a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The rotary apparatus includes a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.

FIELD OF THE INVENTION

The invention relates to an apparatus and a method for the treatment ofworkpieces with fluids in general and for the coating of hollow bodiesin particular.

BACKGROUND OF THE INVENTION

Plastics, in particular transparent plastics, are becoming increasinglyimportant and in many sectors are displacing glass as the preferredmaterial.

One example includes drinks bottles, which a few years ago were madealmost exclusively from glass but nowadays are already to a large extentbeing made from PET. The reason for this is the huge weight saving.

However, plastic bottles may also have a number of drawbacks compared toglass bottles, for example the plastics used, such as PET, areinsufficiently impervious to gases, and consequently the shelf life isshorter, in particular in the case of carbonated drinks, than with glassbottles unless special measures are implemented.

For this reason, plastic bottles are internally provided with a coating,which leads to an increase in the shelf life.

Since drinks bottles are mass-produced products, there is a hugepressure on cost, and consequently there is an ongoing demand forimprovements to the coating methods and the apparatuses used for them.

Accordingly, to efficiently coat PET bottles and other workpieces madefrom dielectric material, preferably plastics, it is desirable todevelop an apparatus and a method which allow very short cycle times andtherefore a high throughput. Typical throughputs required are in theregion of 10 000 bottles per hour.

WO 00/58631 has disclosed a machine of this type with a conveyorcarousel for the treatment of hollow bodies, in which 20 identicaltreatment stations are arranged on the conveyor carousel.

The invention defined in the document referred to above is based on theproblem that with a large number of treatment stations there is a riskof two adjacent treatment stations being simultaneously connected to thesame pressure source.

In the above document, the proposed solution is to provide a machinehaving a first pumping phase and a second pumping phase as well as adeposition phase in which the stations for the various phases areconnected to pumps. Furthermore, it is assumed that the weight andvolume of the pumps prevent them from being mounted on the carousel.Therefore, the pumps are in a fixed position and a rotating connectionor distributor is used to connect the pumps to the stations.

Furthermore, the 20 stations are divided into two groups, each groupbeing assigned to an independent and equivalent pressure source, or thegroups being differentiated on the basis of which pumps they areconnected to. The rotating distributor determines the instants duringthe rotary movement of the conveyor carousel at which a certain pump isconnected to a certain treatment station, the distributor for thispurpose having a rotating ring comprising 20 openings and a fixed ringcomprising in each case 3 slots for the two groups. To benefit from thisarrangement, the machine is designed in such a way that two stations ofthe same group are not simultaneously connected to the correspondingpump.

Accordingly, the invention described defines as its subject matter amachine which is able to include a large number of stations and at thesame time to ensure that a pressure source at a defined instant is onlyconnected to at most one treatment station.

However, this machine has a number of serious drawbacks.

Firstly, the parallel connection of a plurality of pumps isdisadvantageous, since multiple tube routing is required.

Furthermore, the stationary arrangement of the pumps is disadvantageous,since the paths from the stations to the pump are relatively long andtherefore the pump power is reduced.

However, the use of the rotatable distributor is particularlydisadvantageous. Distributors of this type are extremely difficult toseal and are susceptible to faults caused by foreign bodies.Furthermore, on account of the fixedly predetermined openingarrangement, the distributor does not allow any variation to the processsequence and therefore this represents an inflexible design.

However, it is not only the method which takes place on theabovementioned apparatus but also the coating of amorphous carbon usedwhich is in need of improvement, since this coating is undesirablycolored. Furthermore, there is a risk of the layer of carbon flaking offin the event of deformation to the bottle.

SUMMARY OF THE INVENTION

Therefore, the invention is based on the object of providing anapparatus and a method for the treatment of workpieces which avoid or atleast alleviate the drawbacks of known apparatuses and methods.

A further object of the invention is to provide an apparatus and amethod for the treatment of workpieces which operate reliably and ensurea high throughput.

Yet another object of the invention is to provide an apparatus and amethod for the treatment of workpieces which can be flexibly matched tothe requirements of the user or of the desired process sequence.

Yet another object of the invention is to provide an apparatus and amethod for the treatment of workpieces which ensures an improved supplyof fluid, in particular allowing operation with few interruptions.

Yet another object of the invention is to provide an apparatus and amethod for the treatment of workpieces which make it possible to achievean improved coating, in particular in terms of coloration and bonding.

The object of the invention is achieved in a surprisingly simple way bythe subject matter of the independent claims. Advantageous refinementsof the invention are defined in the subclaims.

A preferred embodiment of the invention provides an apparatus for thetreatment of workpieces, in particular for the internal coating ofhollow bodies. Workpieces to be coated are in particular plasticcontainers, e.g. drinks bottles.

The apparatus according to the invention comprises at least onetreatment device, preferably a plurality of identical treatment devices,which are each designed to receive at least one workpiece or a plasticbottle, and a fluid supply apparatus, which supplies the treatmentdevice with at least one process fluid for the coating.

Furthermore, the apparatus comprises at least one fluid control device,in particular a first valve arrangement having a plurality of valves,the supply of fluid to the treatment devices being controllable by meansof the first valve arrangement, in particular by means of the valves.

The control of the fluid or gas supply can advantageously be programmedextremely flexibly and variably by means of the first valve arrangement.Consequently, the time control or the process sequence defined by theapparatus can be altered and can easily be matched to differingrequirements. Furthermore, the invention allows short switching timesand therefore a rapid change to the process parameters.

Furthermore, the apparatus according to the invention operates reliablyand with a high throughput.

In addition the invention allows an efficient treatment or coating,which is therefore inexpensive in the long term, of the workpieces withan excellent quality.

It is preferable to provide a plurality of, in particular identical,treatment devices and for the first valve arrangement to comprise aplurality of, in particular identical, valve groups, each treatmentdevice being assigned a separate valve group. It is preferable for thevalve groups each to comprise a plurality of if appropriate identicalvalves.

As a result, each treatment device or its fluid supply canadvantageously be actuated independently of the other treatment devicesby means of its associated valve group.

According to a preferred refinement of the apparatus according to theinvention, the apparatus defines a plurality of, in particulardifferent, process phases, which are each passed through by thetreatment devices. More specifically, each treatment device successivelypasses through all the process phases, so that in particular at leasttwo or all of the treatment devices are in different process phases atat least one or each instant.

Each process phase is assigned a predetermined state of the first valvearrangement, it being possible for the state to be set variably for eachphase by a formula. The term formula is to be understood as meaning an,in particular predetermined, sequence of the process effected by meansof the control unit. A higher flexibility is advantageously achieved byparameters which can be set freely, for example switching times,switching angles and/or switching durations, etc.

It is preferable for the formula, the assignment to the process phasesand/or the duration of the process phases to be set differently fordifferent workpieces, e.g. different bottle volumes and geometries,making the invention even more flexible.

In particular, each process phase is time-correlated with apredetermined state of the valve group permanently assigned to therespective treatment device. In other words, the process phases of eachtreatment device are controlled by means of the associated valve group,or the prevailing process phase of each treatment device is defined bythe state of the associated valve group.

This further improves the accuracy, speed and flexibility of theapparatus.

It is preferable for the first valve arrangement, in particular eachvalve group or the valves, to be controllable, preferably independentlyof one another, by means of control signals. The valve arrangement orthe valve block or the valves are controlled in particular electrically,pneumatically and/or hydraulically, etc., which has a beneficial effecton the control times and therefore on the process speed.

According to a preferred embodiment of the invention, the apparatusdefines at least two or more process phases, the workpiece being coatedwith a first and a second coating during at least a first and a secondprocess or coating phase, respectively. The first and second coatings inparticular comprise different materials.

It is preferable for at least in each case one diaphragm with apredetermined opening, preferably of identical size, to be assigned toat least one of the treatment devices, in particular each treatmentdevice, in order to reduce the pressure in the fluid feed. In thiscontext, the diaphragm defines a predetermined through-flow quantity fora defined admission pressure. This represents an extremely simple andinexpensive way of reducing the pressure.

According to an advantageous and therefore preferred refinement of theinvention, the apparatus comprises a fluid distributor device, by meansof which the fluid is distributed to the treatment devices, and/or aflow-quantity setting means, e.g. a mass flow controller, which isarranged upstream of the fluid distributor device, as seen in the fluiddirection of flow. Therefore, the fluid or gas flow rate can be setcentrally for all the treatment devices.

This is advantageous from a cost aspect, since despite the large numberof reactors the gas flow through each individual reactor does not haveto be set by in each case a separate mass flow controller or molecularflow controller, but rather a mass flow controller is simply providedfor each process gas.

Nevertheless, the invention allows a rapid change to at least one of thefollowing process parameters:

-   -   composition of the process fluid or a precursor,    -   precursor concentration,    -   total gas flow rate, and    -   pressure in the treatment devices.

Furthermore, a change in at least one or more process parameters in thetreatment devices can be set independently of one another and/or at aninstant in time which can be selected as desired.

It is preferable for the fluid supply apparatus to make available aplurality of different fluids, in particular process gases, in whichcase in particular each valve group has a separate valve for each fluidand/or a separate diaphragm for each treatment device. This means inparticular that the different fluids are fed to the treatment devices inseparate feed lines and the flows of fluid can be controlledindependently of one another.

Two-layer or multilayer systems are advantageous for the coating ofplastics in order to satisfy the demands imposed on layer-substratebonding. By way of example, a first, organic bonding layer is deposited,and then, in one or more further steps, further functional layers, inparticular a barrier layer, are applied, these layers differing withregard to at least one physical or chemical property, such as forexample the composition, density, roughness, morphology, growth mode,reflection/transmission, barrier action.

The bonding layer increases the bonding and prevents or at least impedesundesirable flaking of the layers. Furthermore, the combination of thetwo layers has a synergistic effect whereby the bonding layer alsoboosts the barrier action.

A two-component or multicomponent coating as provided by the inventionis highly advantageous in particular for workpieces in the form ofplastic drinks bottles since it is possible to lengthen the shelf lifeof the drink and, at the same time, undesirable introduction of thelayer material into the drink is avoided.

For rapid coating of plastic containers, when using a CVD process, inparticular PECVD, preferably PICVD, it is advantageous to use a gasgeneration method using the fluid supply apparatus and a coating methodwhich provides at least two different gases or gas mixtures.

In one particularly advantageous embodiment of the invention, at leastone, or even more preferably each, of the treatment devices comprises atleast two or more treatment stations or reactors, which are eachdesigned to receive a workpiece and in particular are parallel andsymmetrical in structure and therefore are simultaneously connected tothe process stages, with identical process parameters being establishedin the treatment stations. In other words, the treatment stations andtherefore the workpieces which they hold in a defined treatment devicepass through the process phases in such a manner that the respectivetreatment stations are in the same process phase at least at oneinstant, in particular at each instant.

Preferably, therefore, the treatment stations are divided into two ormore groups, each group being assigned in particular to precisely onetreatment device, and the treatment stations being switched identically,in such a manner that at least the evacuation of the treatment stationsbelonging to the same group or treatment device is synchronized, withthe result that at least two treatment stations, in particular thetreatment stations belonging to the same group, at least from time totime are simultaneously connected to the same pump.

The treatment stations of a respective treatment device are in this caseassigned to the same valve group. A number of two or a multiple of two,in particular four, six, eight or more, treatment stations or reactorsper treatment device has proven particularly appropriate.

Connecting up a plurality of treatment stations which are switchedidentically in a treatment device allows the apparatus throughput to beincreased considerably with little extra outlay.

In this case, the process gases are in particular distributed uniformlyto a plurality or all of the reactors, preferably from 10 to 100 ofthem. It is preferable for the individual reactors either in each caseto have a separate gas feed or for the reactor groups, e.g. doublereactors, to be supplied with the process gases jointly.

It is preferable for the apparatus to define a treatment cycle with aplurality of process phases, the treatment cycle being passed through byat least one or each treatment device in a manner which is offset interms of time with respect to the other treatment devices. Likewise, atleast one or each valve group passes through a predetermined cycle ofstates, with each process phase of a particular treatment device beingcorrelated with a defined but controllable state of the associated valvegroup. It is preferable for each treatment device to pass through theidentical treatment cycle in particular at least with regard tosequence, time, duration and/or interval between the phases.

The apparatus according to the invention is in particular a once-throughor rotary installation and comprises a static portion and a moveableportion or rotor. The treatment devices are preferably arranged at themoveable portion or the rotor and move or rotate with the latter. Inthis case, each treatment device adopts a plurality of positions orangular positions during the treatment cycle, each position beingcorrelated with a predetermined process phase. In other words, theprocess phases are synchronized with the positions or angular positions,and this synchronization is also controllable. For this purpose, it ispreferable for the valve groups to be controlled synchronously with theangular position of the rotor.

It is particularly preferable for the first valve arrangement to bearranged at the moveable portion or rotor so as to move or rotate withit. This allows simple fluid routing.

An exemplary embodiment of the invention in which a pump device isprovided for evacuating the treatment devices at least from time to timeusing at least one pump, e.g. a Roots pump, is particularlyadvantageous.

Consequently, the pump device can be connected to the treatment devicesfixedly or without rotating distributor, and the phased evacuation ofthe treatment devices, more specifically the start and/or end of theevacuation phases, is controlled, if appropriate using closed-loopcontrol, by means of an evacuation control device. This is highlyadvantageous in particular in the case of the rotary installation.

The evacuation control device controls the assignment of the treatmentdevices to the pump device and preferably comprises a second valvearrangement, so that the evacuation is controlled via valves. It ispreferable for the second or pump-side valve arrangement also to bedivided into valve groups, in such a manner that each treatment deviceis assigned a valve group, with in particular in each case one valve ofthe valve groups being assigned to a feed device or vacuum pump in orderto achieve independent control of the assignment of the individualvacuum pumps. The valves are preferably of the same type as the valvesof the first valve arrangement, i.e. the valve arrangement on the fluidfeed side.

The treatment devices are evacuated, preferably cyclically, by means ofthe pump device, and control by means of the evacuation control deviceis effected by means of, for example, changeable control signals.Therefore, the evacuation and/or the fluid feed can be controlledpreferably variably and/or individually with respect to the particulartreatment devices.

It is preferable for the pump device to comprise at least two pumpswhich are assigned to different pressure ranges and effect cascaded orstepped evacuation. In particular, each treatment device is first of allconnected to a first pump and evacuated to a first pressure, before thenbeing disconnected from the first pump and connected to a second pumpand evacuated by the second pump to a second, lower pressure.

According to a preferred embodiment, each treatment device passesthrough a plurality of different process phases during rotation of therotor, the pump device comprising at least a first and a second pumpstage, which are assigned to different pressure ranges, and thecorresponding treatment device being successively evacuated in steps bymeans of the first and the second pump stage. Furthermore, at least athird and/or a fourth of the process phases is in each case a coatingphase, during which the corresponding treatment device is evacuated bymeans of the pump device, in particular by means of a third or fourthpump stage, while at the same time a process gas is being supplied forplasma coating.

It is particularly advantageous if the first and the second pump stagein each case comprise just one first or second vacuum pump,respectively, so that all the treatment devices in their first pumpingphase are connected to the first vacuum pump and evacuated and in theirsecond pumping phase are connected to the second vacuum pump andevacuated.

This advantageously enables the number of expensive vacuum pumps, forexample large-volume Roots pumps, to be minimized.

Furthermore, it is preferable for the pump device to be arranged at orsecured to the rotor so as to rotate therewith.

At first glance, it may appear disadvantageous for the heavy pumps to besecured to the rotor. However, in particular the combination with areduced number of vacuum pumps, on account of the relatively low weightloading, surprisingly and synergistically reverses this apparentdrawback even to the extent that it becomes an advantage, since it is inthis way possible to dispense with a rotating sealing connection or apump-side rotary slide leadthrough which places the treatment devices incommunication with the pump device, as connections of this type aredifficult to seal.

Furthermore, it is preferable for the first and the second treatmentstation of the respective treatment device to be simultaneouslyconnected to the pump stage belonging to the respective process orpumping phase and evacuated. This is because the inventors havediscovered that it is advantageous for a plurality of treatment stationsor positions to be evacuated simultaneously using the same pump, sincein this way the process sequence can be improved and an increasedthroughput can be achieved.

It is preferable for parameter changes with regard to the treatmentdevices to take place at different instants and/or, with regard to thetreatment stations of a specific treatment device, simultaneously. Theparameter changes are in particular switched cyclically with respect tothe rotation of the rotor or at equal time intervals.

Furthermore, different process parameters are set simultaneously in atleast two reactors. Furthermore, in substantially each rotor position,there is in each case at least one treatment device in the first and thesecond coating phase, so that at each instant the coating devices aredivided into a first process group and a second process group havingfirst and second parameter settings. It is preferable for the number ofreactors with the first parameter setting to be less than or equal tothe number of reactors with the second parameter setting, for the secondcoating phase to last as long as or longer than the first.

This concept is particularly advantageous for rotary apparatuses but mayalso be used for batch installations, in which individual reactor groupsare supplied with process gas with a time delay. The advantage for batchinstallations is that a lower total gas flow rate is required for theapparatus as a whole, and therefore the suction capacity for the vacuumpumps is also lower than if the gases are introduced simultaneously intoall the treatment devices or if a completely identically connectedmethod is used.

Furthermore, it is preferable for the two successive coating phases todiffer with regard to at least one of the following parameters:

-   -   different concentrations of the process fluid,    -   different pressures of the process fluid,    -   different quantitative flow of the process fluid,    -   different precursors for the coatings.

It is particularly advantageous for the pumping phase for the first andthe second treatment station of a treatment device to be started andended simultaneously, since this also makes a contribution to improvingthe process economics.

Unlike the pump device, the fluid supply apparatus is preferablyarranged at the static portion of the apparatus, so that it isadvantageously possible to change fluid storage vessels or cylinderswithout having to stop the rotor.

It is preferable for the fluid supply apparatus to comprise at least twofluid storage devices containing different fluid base materials forproducing the at least two coatings, so that the first and the secondlayer can be applied using the first and the second fluid, respectively,during two different process or coating phases. The workpieces are inthis case coated by means of chemical vapor deposition (CVD), inparticular plasma-enhanced CVD (PECVD) or CVD with pulsed plasma (plasmaimpulse CVD, PICVD).

It is preferable for the fluid to be fed to the treatment devices via arotatable, sealing connection in the fluid feed, by means of which thefluid supply apparatus is connected to the treatment devices, ifappropriate indirectly with further devices, in particular the firstvalve arrangement, connected in between, it being possible, inparticular when the apparatus is operating, for the fluid to be removedcontinuously for the treatment devices at the outlet of the connection.

With regard to the fluid direction of flow, the flow-quantity settingmeans are arranged downstream of the fluid storage device, and aseparate mixing device for each fluid storage device is arrangeddownstream of the fluid-quantity setting means for the purpose of mixingthe fluid from the fluid storage device with in each case at least onefurther fluid, the connection is arranged downstream of the mixingdevice, the fluid distributor device is arranged downstream of theconnection, the diaphragms are arranged downstream of the fluiddistributor device and/or the valve groups are in each case arrangeddownstream of the associated diaphragms. It is preferable for thediaphragms and/or valves to be located close to the correspondingreactor, e.g. at a distance of <50 cm, <30 cm or <15 cm, and/or to bearranged at the rotor.

The sequence of the method according to a preferred embodiment is asfollows, with each treatment device, or its treatment stations, passingthrough a treatment cycle which comprises at least the following processphases, preferably in this order:

-   -   mounting workpieces in and closing the treatment device,    -   evacuating the treatment device to a first pressure using a        first pump stage,    -   evacuating the treatment device to a second pressure, which is        lower than the first pressure, using a second pump stage,    -   coating the workpiece in the treatment device with a first        coating material,    -   coating the workpiece in the treatment device with a second        coating material,    -   venting the treatment device,    -   opening the treatment device and removing the workpiece.

The following text provides a more detailed explanation of advantageousembodiments of the fluid supply to the apparatus.

According to a preferred refinement of the invention, the apparatuscomprises a fluid supply apparatus, which comprises a first fluidstorage device for a first fluid base material, a fluid feed for a firstmixing fluid, a mixing device used to mix the first fluid base materialand the first mixing fluid, a fluidtight first line that connects thefirst fluid storage device to the mixing device, a fluidtight secondline that connects the fluid feed for the first mixing fluid to themixing device, and a first flow-quantity setting means in the firstline, in particular upstream of the mixing device, which can be used toset the quantitative flow of the first fluid base material.

It is particularly preferable for the first fluid base material in thefirst fluid storage device to be liquid. In this case, the first line isheated in order to evaporate the first fluid base material, so that thefirst fluid base material and the first mixing fluid, both in thegaseous state, can be mixed at the mixing device. In this way, a processfluid which is gaseous at room temperature is provided at the outlet ofthe mixing device.

It is preferable for the fluid supply apparatus also to have a secondflow-quantity setting means, which is arranged in the second line, inparticular upstream of the mixing device, and is used to set thequantitative flow of the first mixing fluid.

It is preferable for the fluid supply apparatus also to comprise asecond fluid supply device which is constructed in the same way as thefirst fluid supply device, the first and second fluid supply devicescontaining different fluid base materials. As a result, for example forcoating with two different materials, two different process gases areprovided for the treatment devices simultaneously via two separatelines.

The process gases are preferably mixtures of firstly a metal-containingor silicon-containing and/or hydrocarbon-containing fluid and secondlyat least one further fluid which contains oxygen, nitrogen, argon and/orhelium. An HMDSO/O₂ mixture from the first fluid supply device and anHMDSN/O₂ mixture from the second fluid supply device are particularlypreferred.

Furthermore, it is preferable for the first and/or second fluid storagedevice each to comprise two redundant vessels containing the same fluidbase material. This even allows the storage vessels to be exchangedwithout stopping operation of the apparatus, thereby avoiding aproduction shutdown. The redundant vessels are connected to one anotherin particular upstream of the first flow-quantity setting means and canbe disconnected from the latter by means of in each case one valve.

It is preferable for the apparatus also to comprise a purge device forpurging the treatment devices or reactors with a purge gas, preferablyoxygen, nitrogen and/or dried air. Purging is preferably carried outafter application of the second layer, before or after and/or duringventing. In this way, unused gas is advantageously removed, so that itis possible to avoid or reduce the extent of undesired reactions withthe atmospheric humidity. Furthermore, in this way the absorption of theprocess gases at a surface of the workpiece is avoided. In a preferredembodiment, the purging of all the treatment devices is carried out atdifferent instants, preferably cyclically and/or at regular intervals.

In the text which follows, the invention is explained in more detail onthe basis of exemplary embodiments and with reference to the drawings,in which identical and similar components are provided with identicalreference numerals and the features of various embodiments can becombined with one another.

BRIEF DESCRIPTION OF THE FIGURES

In the drawing:

FIGS. 1 a-1 h diagrammatically depict a first embodiment of theapparatus according to the invention in various rotor positions inaccordance with an example of a process sequence,

FIGS. 2 a-2 b show a summary in table form of the process sequencecarried out by the apparatus illustrated in FIGS. 1 a-1 h,

FIG. 3 diagrammatically depicts the apparatus shown in FIGS. 1 a-1 h,

FIG. 4 shows an enlarged excerpt X from FIG. 3, and

FIG. 5 shows a further enlarged excerpt from FIG. 3 including the fluidsupply apparatus 80.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 a diagrammatically depicts a rotor 32 of an apparatus 30according to the invention.

On the rotor 32 there are twelve treatment devices, represented by thecircles. Each treatment device comprises two treatment stations orreactors, which are numbered consecutively from 1 to 24. The treatmentdevices are distributed uniformly, i.e. are arranged at angularintervals of 30°.

Furthermore, eight process phases are illustrated, namely:

-   -   a starting phase S,    -   a first pumping phase PI,    -   a second pumping phase PII,    -   a first coating phase BI,    -   a second coating phase BII,    -   a vent phase V,    -   an end phase E, and    -   an auxiliary phase A.

FIG. 1 a shows a time state in which the treatment stations 1 and 2 arein the starting phase S. This also predetermines the respective processphases or process steps of the other treatment devices or treatmentstations. The treatment stations 3 and 4 are in the first pumping phasePI, the treatment stations 5 and 6 are in the second pumping phase PII,the treatment stations 7 and 8 are in the first coating phase BI, thetreatment stations 9 to 16 are in the second coating phase BII, thetreatment stations 17 to 20 are in the vent phase V, the treatmentstations 21 and 22 are in the end phase E, and the treatment stations 23and 24 are in the auxiliary phase A.

In operation, the rotor rotates, so that each treatment device passesthrough the entire cycle of the stationary process phases. FIG. 1 bshows the rotor in a state which is 30° later than that shown in FIG. 1a. Accordingly, the treatment stations 1 and 2 are now in the firstpumping phase PI. FIGS. 1 c to 1 h each illustrate a state in which therotor has been rotated further, with the reactors 1 and 2 in each casebeing in a further process phase. Therefore, FIGS. 1 a to 1 h show acomplete treatment cycle, although the states in which the process phaseof the reactors 1 and 2 does not change are not illustrated.

The following text provides an explanation of the individual processphases with reference to FIG. 1 a. In this state of the rotor, thetreatment device comprising the reactors 1 and 2 is in the startingphase S, in which the treatment device is open. Furthermore, in aninsertion operation the two reactors 1 and 2 simultaneously andidentically have in each case one PET bottle mounted in them and arethen closed again.

In the first pumping phase PI, the two reactors 3 and 4 aresimultaneously connected to a first pump stage in order to be evacuateddown to the first pressure. In the second pumping phase PII, the tworeactors 5 and 6 are simultaneously connected to a second pump stage inorder to be evacuated down to a lower, second pressure. Therefore, thetreatment devices are evacuated in steps, and therefore highlyeffectively, by means of the first and second pump stages.

In the first coating phase BI, the two PET bottles in the reactors 7 and8 are coated with a first coating, more specifically an SiO_(x)C_(y)bonding layer, from the inside.

For this purpose, a mixture of hexamethyldisiloxane (HMDSO) and oxygenis used as process gas. This mixture is introduced into the two reactors7 and 8 simultaneously. In the first coating phase BI, the reactors 7and 8 are supplied with a first process gas and evacuated inthrough-flow mode using a third vacuum pump.

The second coating phase BII takes up four 30° sectors of the treatmentcycle, since the coating should last four times as long as the firstcoating phase BI. Accordingly, there are four treatment devices orplasma stations, more specifically reactors 9 to 16, in the secondcoating phase BII simultaneously, and in this second coating phase theyare supplied with a second process gas and are jointly evacuated inthrough-flow mode by a fourth vacuum pump. Therefore, in particular ateach instant, there is a different number of treatment devices in thefirst and second coating phases.

In the second coating phase BII, a vitreous silicon oxide or SiO_(x)barrier layer is deposited. This layer is colorless and transparent. Toproduce the barrier layer, a mixed gas comprising hexamethyldisilazane(HMDSN) and oxygen is introduced into the reactors.

With regard to the layer composition, reference is made to applicationDE 102 58 681.0, filed on Dec. 13, 2002 in the name of the sameApplicant, the content of which is hereby incorporated in full byreference in the subject matter of the present disclosure.

The coating in the first and the second coating phases BI, BII iscarried out by means of PICVD. In this exemplary embodiment, the PICVDprocess is used only for internal coating of the bottles, but it mayalso be used for external coating. One major advantage of the PICVDprocess is an additional process flexibility, allowing the barrier layerto be matched even more deliberately to the customer requirements.Furthermore, pulsation of the plasma results in optimum conversion ofthe process gas used, since gaseous byproducts formed during thereaction are effectively pumped out during pauses between the pulses.Furthermore, the layers which are deposited are distinguished by a highdegree of homogeneity and a high chemical purity. In addition, thethermal loading on the PET bottles is reduced.

At the same time, the double coating produces excellent bonding of thecoating system and a high barrier improvement factor (BIF). A BIF ofapproximately 10 to 30 is achieved for O₂ and of approximately 4 to 7for CO₂. In addition to CO₂ being prevented from escaping from thebottle, it is also possible to reduce the extent to which O₂ penetratesinto the bottle and to which acetaldehyde escapes from the PET into thedrink.

During the vent phase V, the reactors 17 to 20 are vented. Then, thereactors 21 and 22 are opened in the end phase E and the coated bottlesare removed.

The auxiliary phase A, in which reactors 23 and 24 are located, is notrequired for the coating process in this embodiment.

FIGS. 2 a to 2 b show a summary in table form, divided into 5° anglesteps, of the sequence of the process phases S, PI, PII, BI, BII, V andA for all 24 reactors.

FIG. 3 then diagrammatically depicts the structure of the apparatus 30according to the invention.

The coating apparatus 30 comprises the rotor 32 and a stationary fluidsupply apparatus 80. The dashed line L diagrammatically represents therotor or the plasma wheel 32, so that those components which areillustrated inside the line L are arranged at or on the rotor 32 androtate therewith.

Twelve treatment devices 101 to 112 are arranged on the rotor 32,although only the four treatment devices 101, 102, 111, 112 areillustrated in FIG. 3, for the sake of clarity.

Each treatment device 101 to 112 comprises in each case two treatmentstations or reactors for receiving in each case one PET bottle which isto be coated. The treatment device 101 comprises the treatment stations1 and 2, the treatment device 102 comprises the treatment stations 3 and4, etc., up until the treatment device 112, which comprises thetreatment stations 23 and 24.

The internal coating of the PET bottles is carried out by means of thePICVD technique, with which the person skilled in the art will bethoroughly familiar. In this process, the in each case two reactors of atreatment device are assigned the same radio-frequency source, and thecoating in the two reactors takes place simultaneously and identically,with the in each case two reactors comprising separate chambers orvacuum chambers.

Preferably, therefore, the in each case first reactors 1, 3, 5, . . . ,23 of the treatment devices 101 to 112 form a first group of treatmentstations, and the in each case second reactors 2, 4, 6, . . . , 24 ofthe treatment devices 101 to 112 form a second group of treatmentstations, with in each case one reactor belonging to the first group andone reactor belonging to the second group being associated with oneanother in pairs (1 and 2; 3 and 4; 5 and 6; . . . ; 23 and 24) and thetwo reactors of each pair being assigned to the same vacuum pumps and/orpassing synchronously through the treatment process.

The treatment devices 101 to 112 are assigned a fluidtight liquid or gascontrol device 40, which in this example comprises a multiplicity ofvalves and diaphragms.

The supply of gas to the treatment devices is time-controlled by meansof the gas control device 40. The gas control device 40 comprises afirst valve arrangement 50 having in each case one valve group 501 to512 for each treatment device 101 to 112. The parallel-connected valvegroups 501 to 512 comprise in each case three electrically controlledvalves 501 a to 512 a, 501 b to 512 b and 512 a to 512 c, which eachhave a fixed diaphragm connected upstream of them. Therefore, thedistribution or allocation of the process gases to the treatment devicesis effected via the valves 501 a/b to 512 a/b.

In principle, however, it is also possible to use a rotating rotaryleadthrough or rotary coupling, in which in particular passages whichrealize the cyclical gas changes are provided, instead of the valvearrangement 40. However, control by means of valves is more flexible andconsequently the treatment devices can even be actuated separatelyand/or differently.

Referring now to FIG. 4, which shows an excerpt from the fluid controlin more detailed form than FIG. 3, the following text provides anexplanation of the valve control on the gas routing side on the basis ofthe example of the first valve group 501. The other valve groups 502 to512 and the corresponding further components connected upstream anddownstream of each valve group are identical in form.

The first valve group 501 comprises three parallel-connectedelectropneumatic valves 501 a, 501 b, 501 c. The first valve 501 asupplies the treatment device 101 with the first process gas, the secondvalve 501 b supplies the treatment device 101 with the second processgas, and the third valve 501 c supplies the treatment device 101 with apurge gas SG.

The supply of the operating media or gases (purge gas, first and/orsecond process gas) can be controlled independently of one another andin a manner which can be selected freely or variably in terms of time.

The valves each have a short switching time of <500 ms, preferably <100ms. Furthermore, the valves are directly adjacent, at a distance ofpreferably <50 cm, to the treatment devices. Consequently, coatingparameters, such as for example the precursor concentration, the totalflow rate, the pressure and/or the process gas or the precursor, can becontrolled or changed very quickly. At least 95% of the mixture can bechanged in less than 200 ms.

A fixed diaphragm 601 a, 601 b, 601 c is in each case connected upstreamof the corresponding valves 501 a, 501 b, 501 c, so that each treatmentdevice is assigned a valve-diaphragm pair for each process gas.

The aperture diameter of the diaphragms is small compared to the linediameter, so that the line resistance in the feed line is negligible andthe gas flow is substantially determined by the diaphragms. For thispurpose, the aperture diameter is approximately 0.1 mm to 5 mm,preferably 0.2 mm to 2 mm, particularly preferably in the region of 1mm. As a result, in an equilibrium state a predefined pressure isestablished on both sides of the diaphragms. This solution usingdiaphragms is much less expensive than the use of a multiplicity of massor molecular flow controllers at this location.

The diaphragms distribute the fluids uniformly or symmetrically over allthe reactors. By way of example, a total flow rate of 9600 sccm isdivided uniformly between 24 reactors, at 400 sccm per reactor.

Furthermore, the diaphragms have a relative deviation of <20%,preferably <10%, so that the process gases are distributed uniformlybetween the treatment devices.

The gas supply is provided by the fluid or gas supply apparatus 80,which provides the two different process gases via two separate feedlines or operating-medium feed lines 42 a, 42 b. The two process gasesand the purge gas SG are passed continuously onto the rotor 32 via arotary leadthrough 82.

The gas supply apparatus 80, which is illustrated in detail in FIG. 5,comprises a first and a second fluid or gas supply device 80 a, 80 b,which are identical in structure. The two gas supply devices 80 a, 80 bdiffer only in that they provide two different fluid base materials(precursors). The two gas supply devices 80 a, 80 b therefore provide atleast two process gases or gas mixtures with different compositions,flow rates and/or pressures for the at least two successive coatingphases BI and BII, which may optionally merge into one another, with thefirst coating being carried out by means of the first process gas andthe second coating being carried out by means of the second process gas.The gas change between the two process gases or gas mixtures mayadvantageously be switched over quickly, inter alia allowing accuratecontrol of the concentration of the gas mixtures.

The first gas supply device 80 a comprises a fluid storage device 81 awith two fluid vessels or tanks 84 a, 85 a, with an identical firstprecursor, in this example HMDSO, in each of them. The redundant designof the two vessels 84 a, 85 a makes it possible to change one of the twocontainers while treatment remains continuously ongoing.

The HMDSO from one of the two vessels 84 a, 85 a is fed to a firstflow-quantity setting means or mass flow controller 88 a via a firstline section 86 a or 87 a. The quantitative flow of the first fluid basematerial is controlled by means of the preferably thermal orpressure-based mass flow controller 88 a.

Furthermore, the first gas supply device comprises a feed line 90 a, viawhich gaseous oxygen (O₂) is provided. The quantitative flow of theoxygen is controlled by means of a second flow-quantity setting means ormass flow controller 92 a. Therefore, only one mass flow controller perprocess gas component is required.

The mixing ratios, flow rates and/or concentrations of the process gasescan be set independently of one another by means of the mass flowcontrollers 88 a, 88 b, 92 a, 92 b.

The first fluid base material and the oxygen are fed to a first mixingdevice 98 a via two line sections 94 a and 96 a, respectively, and mixedto form the first process gas, which is then provided at the rotaryleadthrough 82 via the line 42 a and fed to the treatment devices.

The line sections between the two fluid vessels 84 a, 85 a and the firstmixing device 98 a are heated to approximately 40° C, in order toevaporate the first fluid base material, which is in liquid form in thetwo vessels 84 a, 85 a. After mixing with the oxygen downstream of thefirst mixing device 98 a, the gas mixture or first process gas isgaseous even at room temperature. Therefore, advantageously only arelatively short section of the fluid lines is heated. In particular,there is no need to heat lines on the rotor, since the first process gasis gaseous at room temperature, which simplifies and reduces the costsof the apparatus yet nevertheless avoids condensation.

Referring to FIG. 5, the heated line sections 86 a, 87 a, 94 a, 86 b, 87b and 94 b are indicated by hatching. In particular, there is in eachcase one independently controllable heating device 186 a and 187 a forthe line sections 86 a and 87 a of the redundant fluid vessels 84 a and85 a, so that condensation is avoided even when the fluid vessel isbeing changed. Furthermore, there is an independent heating device 194 afor the common line section 94 a.

The second gas supply device 80 b is in structural terms identical tothe first fluid supply device 80 a. Corresponding components areprovided with the same reference numerals but the index “b” rather than“a”. The two vessels 84 b, 85 b contain HMDSN as the second precursor.

Different mixing ratios are set by the two or if appropriate furtherfluid storage devices 81 a, 81 b, preferably by means of the mass flowcontrollers 88 a, 92 a, 88 b, 92 b. By way of example, it is therebyalso possible to set different HMDSO concentrations for the same fluidbase material, which may be advantageous, for example, for a two-layersystem.

On the pump side, the treatment devices 101 to 112 are assigned anevacuation control device having a second valve arrangement 70, by meansof which the phased evacuation of the treatment devices 101 to 112 or ofthe reactors 1 to 24 is controlled. The second valve arrangement 70comprises in each case one valve group 701 to 712, having in each case afirst and a second electrically controlled valve, for each treatmentdevice 101 to 112, for gradual two-stage evacuation by means of a firstand second vacuum pump 72, 74.

The vacuum pumps 72, 74 are designed as Roots pumps and are secured tothe rotor 32. This advantageously eliminates the is need for a rotaryleadthrough on the pump side. The two Roots pumps 72, 74 which form thepump device 71 each have a control valve 76, 78, for example a flappervalve, connected upstream of them. The gas pressure for thecorresponding process gas is controlled in open-loop or closed-loop formby means of the flapper valves.

The text which follows provides a more detailed explanation of the valvecontrol of the apparatus on the gas feed side and the pump side withreference to FIGS. 1 a to 1 h, 2 a, 2 b and 3.

In the starting phase S, all the valves of the first and second valvearrangements 50, 70 are closed when in each case two PET bottles arebeing mounted in the treatment devices 101 to 112 and the treatmentdevices are then being closed.

At the start of the first pumping phase PI, the first valve 701 a to 712a of each of the valve groups 701 to 712 is opened, so that eachtreatment device is connected to the first Roots pump 72 and evacuated.

At the transition from the first pumping phase PI to the second pumpingphase PII, in each case the first valve 701 a to 712 a of the valvegroups 701 to 712 closes, and substantially at the same time the secondvalve 701 b to 712 b of the valve groups 701 to 712 opens, in order toconnect the treatment devices 101 to 112 to the second Roots pump 74, sothat the treatment devices in the second pumping phase PII areevacuated.

A gas ballast valve 73 and 75 (illustrated only in FIG. 4) is in eachcase connected upstream of the Roots pumps 72, 74, respectively, bymeans of which gas ballast valve the process gas concentration in theoff-gas can be reduced. This is advantageous in particular for explosivegas mixtures, since in particular unused process gas can be diluted,thereby reliably keeping it below the explosion limit.

At the start of the first coating phase BI, the valves 501 a to 512 a ofthe first valve arrangement 50 are opened, so that the first process gascomprising HMDSO and O₂ flows into the treatment devices 101 to 112 andthe PET bottles are correspondingly PICVD-coated with an organic bondinglayer.

At the change from the first coating phase BI to the second coatingphase BII, the valves 501 a to 512 a close, and substantially at thesame time the valves 501 b to 512 b open, in order to supply thetreatment devices with the second process gas comprising HMDSN and O₂,with the PET bottles being PICVD-coated with an inorganic barrier layer.

It is particularly preferable for at least two of the valve groups 501to 512 to be switched synchronously, with the associated treatmentdevices changing from one process phase to another, in such a mannerthat one treatment device changes to the previous process phase ofanother treatment device. By way of example, the treatment device 101comprising the stations 1 and 2 changes from the second coating phaseBII to the vent phase V, and synchronously, i.e. simultaneously, thetreatment device 109 comprising the stations 17 and 18 changes to thesecond coating phase BII.

During the first and second coating phases BI and BII, the treatmentdevices preferably remain connected to the second Roots pump 74 in orderto allow the PICVD coating to be carried out in through-flow mode.

In the subsequent vent phase V, all the valves of the valve arrangements50, 70 are closed and the treatment devices 101 to 112 are vented, ifappropriate with nitrogen or dried air.

It will be clear to the person skilled in the art that the embodimentsdescribed above are to be understood as examples and that the inventionis not restricted to these particular embodiments, but rather can bevaried in numerous ways without departing from the spirit of theinvention.

1. An apparatus for the treatment of workpieces, comprising: at leastone treatment device for receiving at least one workpiece; a fluidsupply apparatus that supplies the at least one treatment device with afluid; and at least one fluid control device that can be used to controlthe fluid supply apparatus.
 2. The apparatus as claimed in claim 1,wherein the at least one fluid control device comprises a first valvearrangement.
 3. The apparatus as claimed in claim 1, wherein the atleast one treatment device comprises a plurality of treatment devicesand the fluid control device comprises a plurality of valve groups,wherein each treatment device of the plurality of treatment devices isassigned a valve group from the plurality of valve groups.
 4. Theapparatus as claimed in claim 3, wherein each valve group of theplurality of valve groups can be variably set in a predetermined stateby a formula for an assigned a process phase.
 5. (canceled)
 6. Theapparatus as claimed in claim 1, wherein the at least one fluid controldevice can be controlled by a plurality of control signals.
 7. Theapparatus as claimed in claim 1, wherein the at least one treatmentdevice coats the at least one workpiece with a first coating during afirst process phase, and coats the at least one workpiece with a secondcoating during a second process phase.
 8. The apparatus as claimed inclaim 3, wherein each treatment device of the plurality of treatmentdevices is assigned at least one diaphragm, the predetermined opening ofeach at least one diaphragm being of equal size.
 9. The apparatus asclaimed in claim 1, further comprising at least one control valve forsetting and controlling a process pressure.
 10. The apparatus as claimedin claim 1, further comprising a fluid distributor device fordistributing the fluid to the at least one treatment devices; and aflow-quantity setting device arranged upstream of the fluid distributordevice.
 11. The apparatus as claimed in claim 3, wherein the fluidsupply apparatus makes available a plurality of fluids and each valvegroup of the plurality of valve groups has a valve for each fluid of theplurality of fluids.
 12. The apparatus as claimed in claim 1, whereinthe at least one treatment device comprises at least two treatmentstations wherein the at least two treatment stations are parallel andsymmetrical in structure to one another, and wherein the at least twotreatment stations connect simultaneously to a plurality of processstages.
 13. The apparatus as claimed in claim 3, further comprising atreatment cycle with a plurality of process phases, the treatment cyclebeing passed through by each treatment device of the plurality oftreatment devices in a time-offset manner.
 14. The apparatus as claimedin claim 3, further comprising a treatment cycle with a plurality ofprocess phases, each treatment device of the plurality of treatmentdevices passing through the treatment cycle.
 15. The apparatus asclaimed in claim 3, further comprising a once-through installation thatdefines a treatment cycle with a plurality of process phases, a staticportion, and a moveable portion, the plurality of treatment devicesbeing arranged at the moveable portion, and each of the plurality oftreatment devices adopting a plurality of positions during the treatmentcycle where each of the plurality of positions are assigned a pluralityof predetermined process phases that can be set variably for each of theplurality of process phases by a formula.
 16. The apparatus as claimedin claim 15, wherein the formula can differently assign each of theplurality of predetermined process phases to each of the plurality ofpositions, and wherein the formula can differently set a plurality ofdurations for each of the plurality of process phases.
 17. The apparatusas claimed in claim 3, further comprising a rotary installation having amoveable portion, the moveable portion comprising a rotor.
 18. Theapparatus as claimed in claim 17, wherein the rotor has a plurality ofangled regions for variably assigning a predetermined process phase by aformula.
 19. The apparatus as claimed in claim 17, wherein at least aportion of the at least one fluid control device is arranged at therotor and rotates with the rotor.
 20. The apparatus as claimed in claims17, wherein the rotor has an angular position that can be synchronouslycontrolled with the plurality of valve groups.
 21. The apparatus asclaimed in claim 17, further comprising a pump device with at least onepump arranged at the rotor.
 22. The apparatus as claimed in claim 21,further comprising a plurality of valves for controlling the pump devicefor the cyclic evacuation of the plurality of treatment devices.
 23. Theapparatus as claimed in claim 1, wherein the fluid supply apparatuscomprises at least two fluid storage devices, each of the at least twofluid storage devices containing a fluid base materials.
 24. Theapparatus as claimed in claims 23, further comprising a mass flowcontroller that can set different mixing ratios for the fluid basematerials.
 25. The apparatus as claimed in claim 3, further comprising arotatable sealing connection connecting the fluid supply apparatus tothe plurality of treatment devices, wherein the rotatable sealingconnection feeds the fluid to the plurality of treatment devices. 26.The apparatus as claimed in claim 25, wherein the rotatable sealingconnection has an outlet for the continuous removal of the fluid. 27.The apparatus as claimed in claim 1, wherein the at least one workpiececan be coated by a CVD process.
 28. The apparatus as claimed in claim 1,further comprising a flow-quantity setting device for directing a flowof the fluid, the flow-quantity setting device being arranged downstreamof the fluid supply apparatus.
 29. An apparatus for treating workpieces,comprising: at least one treatment device for receiving at least oneworkpiece; a pump device for evacuating the at least one treatmentdevice at least in a plurality of phases; and at least one evacuationcontrol device that can be used to control the pump device.
 30. Anapparatus for treating workpieces, comprising: at least one treatmentdevice for receiving at least one workpiece; and a fluid supply devicethat supplies the at least one treatment device with at least a firstmaterial and a second material, and wherein the at least one treatmentdevice can coat the at least one workpiece with the first material in afirst coating phase and the second material in a second coating phase.31. An apparatus for the treatment of workpieces, comprising: at leastone treatment device for receiving at least one workpiece; a pump devicefor evacuating the at least one treatment device at least in a treatmentcycle comprising a plurality of phases; and a static portion; and amoveable portion, the at least one treatment device being arranged atthe moveable portion, and the pump device being arranged at the moveableportion.
 32. An apparatus for the treatment of workpieces, comprising: aplurality of treatment devices, wherein each treatment device of theplurality of treatment devices receives at least one workpiece, whereineach of the plurality of treatment devices pass through a treatmentcycle having an identical time profile.
 33. An apparatus for thetreatment of workpieces, comprising: a plurality of treatment devices;and a pump device for evacuating each of the treatment devices of theplurality of treatment devices in at least one process phase of atreatment cycle having plurality of phases, wherein each of theplurality of treatment devices has at least two treatment stations, andwherein each of the at least two treatment stations receives oneworkpiece.
 34. An apparatus for the treatment of workpieces, comprising:at least one treatment device for receiving at least one workpiece; apump device for evacuating the at least one treatment device at least ina plurality of phases; and a purge device for purging the at least onetreatment device with a purge fluid.
 35. A fluid supply apparatus forthe treatment of workpieces, comprising: a first fluid storage devicefor a first fluid base material; a fluid feed for a first mixing fluid;a mixing device for mixing the first fluid base material and the firstmixing fluid; a fluidtight first line connecting the first fluid storagedevice to the mixing device; a fluidtight second line for connecting thefluid feed to the mixing device; and a first flow-quantity settingdevice that can be used to set a flow quantity of the first fluid basematerial.
 36. The fluid supply apparatus as claimed in claim 35, whereinthe first fluid base material is in liquid form in the first fluidstorage device, wherein the fluidtight first line is heatable forevaporating the first fluid base material into a gaseous state so thatat the mixing device the first fluid base material and the first mixingfluid can be mixed in the gaseous state.
 37. The fluid supply apparatusas claimed in claim 35, further comprising a second flow-quantitysetting device that can be used to set a flow quantity of the firstmixing fluid.
 38. The fluid supply apparatus as claimed in claim 35,wherein the first fluid storage device comprises two vessels eachcontaining the first fluid base material.
 39. The fluid supply apparatusas claimed in claim 35, wherein the fluid supply apparatus comprises afirst fluid supply apparatus and a second fluid supply apparatus,wherein the first fluid supply apparatus and the second fluid supplyapparatuses are connected to a plurality of treatment devices via twoseparate lines for simultaneously providing two different process gases.40. (canceled)
 41. A method for operating an apparatus for the treatmentof workpieces, comprising: mounting at least one workpiece that is to betreated in at least one treatment device; supplying fluid to the atleast one treatment device by a fluid supply apparatus; controlling thesupply of fluid to the at least one treatment device by at least onefluid control device; and passing the at least one treatment devicethrough a treatment cycle comprising a plurality of process phases. 42.The method as claimed in claim 41, wherein the step of mounting furthercomprises closing the treatment device, and wherein the passing stepfurther comprises evacuating the at least one treatment device to afirst pressure using a first pump stage; evacuating the at least onetreatment device to a second pressure using a second pump stage whereinthe second pressure is lower than the first pressure; coating the atleast one workpiece in the at least one treatment device with a firstcoating material; coating the at least one workpiece in the at least onetreatment device with a second coating material; venting the at leastone treatment device; opening the at least one treatment device; andremoving the at least one workpiece.
 43. (canceled)
 44. The method asclaimed in claim 41 further comprising synchronously switching a valvegroup of the at least one treatment device to change the at least onetreatment device over from one process phase of the plurality of processphases to another process phase of the plurality of process phases. 45.(canceled)
 46. A rotary apparatus for the coating of workpieces,comprising: a rotor having a plurality of treatment devices eachtreatment device of the plurality of treatment devices for receiving aworkpiece; a pump device that can be used to evacuate the plurality oftreatment devices for a coating process phase; one first vacuum pump fora first pump phase and one second vacuum pump for a second pump phase,wherein the plurality of treatment devices can be connected to the firstvacuum pump for evacuation in a first pumping phase, wherein theplurality of treatment devices can be connected to the second vacuumpump for evacuation in the second pumping phase, wherein the rotorrotates each of the plurality of treatment devices through a pluralityof different process phases, wherein each treatment device of theplurality of treatment devices coats the workpiece during at least oneof the plurality of process phases, and wherein the pump device has aplurality of different pressure ranges for at least a first pump stageand a second pump stage.
 47. The rotary apparatus as claimed in claim46, wherein the pump device is arranged to rotate with the rotor. 48.The rotary apparatus as claimed in claim 46, wherein each of theplurality of treatment devices has at least a first treatment stationfor receiving a first plastic hollow body and a second treatment stationfor receiving second plastic hollow body, the first treatment stationand the second treatment station can be simultaneously connected to thefirst and second vacuum pumps for at least the first pump stage duringthe first pumping phase and the second pump stage during the subsequentsecond pumping phase.
 49. The rotary apparatus as claimed in claim 48,further comprising a vacuum control device for simultaneously beginningand simultaneously ending the first pumping phase and/or second orpumping phases for the first plastic hollow body and the second plastichollow body.
 50. The apparatus as claimed in claim 23, wherein the fluidbase material is identical or different in each fluid storage device ofthe at least two fluid storage devices.
 51. The apparatus as claimed inclaim 28, further comprising a mixing device arranged downstream of theflow-quantity setting device for mixing the fluid with a second fluid.52. The apparatus as claimed in claim 25, further comprising aflow-quantity setting device arranged downstream of the fluid supplyapparatus for directing a flow of the fluid to a mixing device arrangeddownstream of the flow-quantity setting device for mixing the fluid witha second fluid, and wherein the rotatable sealing connection is arrangeddownstream of the mixing device.
 53. The apparatus as claimed in claim52, further comprising a fluid distributor device arranged downstream ofthe rotatble sealing connection.
 54. The apparatus as claimed in claim53, further comprising a plurality of diaphragms arranged downstream ofthe fluid distributor device.
 55. The apparatus as claimed in claim 54,wherein each valve group of the plurality of valve groups is arrangeddownstream of an associated diaphragm of the plurality of diaphragms.56. The method as claimed in claim 41, wherein the at least onetreatment device is a plurality of treatment devices, and wherein thestep of passing further comprises the at least one treatment devicepassing through the treatment cycle in a time-offset manner.
 57. Themethod as claimed in claim 41, further comprising coating the at leastone workpiece by a CVD process.